Silicon microphones

Microphones made by microFAB

microfab has gained distinctive expertise in surface micromachining technology dedicated to the design and serial fabrication of acoustic MEMS devices, such as silicon microphones and ultrasound transducers (cMUTs).

The elementary building blocks of all capacitive acoustic transducers are membranes, either actuated by electrostatic forces or by sound waves, which have to be well controlled in terms of mechanical stress and layer thickness. microfab uses dedicated LPCVD (low-pressure chemical vapor deposition) processes, such as silicon-rich nitrides or in-situ doped polysilicon in combination with sacrificial layer technologies to build such functional layers. All technologies are proven to be capable for serial production in high-volumes and are routinely applied for customized components running at microfab.


Silicon Microphone 1st Generation


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