About us MEMS Foundry MEMS Technologies MEMS Products Quality Management
Home MEMS Foundry Manufactory Diffusion & Doping

MEMS Foundry


Facilities Manufactory

Thin films Diffusion & Doping Lithography Wet etching Dry etching Deep Trenches Wafer bonding Back end

Imprint contact visit microfab

Diffusion & Doping

Diffusion & Annealing

Centrotherm furnace for up to 150mm wafers

Quartz furnace processes (Centrotherm) under inert gas (N2) atmosphere for 100 and 150mm wafer size, batch quantity: up to 25 wafers per run dedicated furnace stacks for p- and n-type dopants and metallization layers are available.

The following standard processes are available:

Furnace Doping

A dedicated tube on our Centrotherm furnace system is installed for saturation-level doping with phosporus (POCl3 source). Low sheet resistances of 11 to 20 Ohm/ can be achieved in a batch process with 100 and 150mm wafer.

Printable Version

Insitu diffusion