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MEMS Foundry


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Facilities

MEMS production

MEMS Wafer Foundry

Processing is conducted in a dedicated class 100/1000 silicon device processing facility with a class 10 lithography clean room.
We are able to tailor our facility to accommodate a wide variety of customer requirements, especially for MEMS devices. We are capable of operating between 100mm and 150mm diameter wafers and can process quartz and glass wafers.

microfab holds accreditation to DIN EN ISO 9001:2008 across all of its activities.

Cleanroom info

Equipment list

With following link you will find a representative listing of the wide variety of foundry equipment we have installed. For more information on any of these equipments, please feel free to contact us.

Equipment list [218 KB]

Printable Version

Cleanroom